Tecnologia Avanzata per Trasferimento Substrati in vuoto
Le transfer valve i-Motion di Science Probe rappresentano una soluzione innovativa per il trasferimento preciso di substrati tra camere vacuum mantenendo condizioni di alto vuoto. Progettate specificamente per semiconductor manufacturing e thin-film applications, queste valvole integrano tecnologia movimento intelligente per eliminazione particelle e durata estesa.
Inoltre, Science Probe combina precision engineering con i-Motion technology per maximum performance in critical substrate handling operations.
Tecnologia i-Motion Rivoluzionaria
Meccanismo Movimento Intelligente
Le transfer valve i-Motion utilizzano un sistema pneumatico avanzato che permette movimento verticale del gate senza contatto con valve body, seguito da spinta orizzontale finale verso gate seat. Di conseguenza, eliminano friction e potential particle generation durante substrate transfer operations.
Caratteristiche i-Motion:
- Movimento verticale senza contact con valve body
- Spinta orizzontale finale con pressure controllata
- Zero friction operation per particle-free environment
- Vulcanized seals per durability superiore
Design Anti-Particelle
Il sistema prevede:
- Contactless movement durante positioning phases
- Uniform seal pressure su entire gate seat
- Minimized activation per clean operations
- Extended maintenance-free operation fino a 3 milioni di cicli
Pertanto, garantiscono substrate transfer con contamination control ottimale.
Applicazioni Semiconductor Avanzate
Manufacturing Processes
Le transfer valve risultano essenziali per:
- Wafer processing tra different process chambers
- CVD equipment per thin-film deposition
- Etching systems con corrosive environments
- Ion implantation per precision substrate handling
Inoltre, supportano multiple semiconductor manufacturing steps con consistency requirements.
Substrate Handling
Per operations critiche:
- Large area substrates fino a display generations
- Precision positioning durante chamber-to-chamber transfer
- Clean environment maintenance attraverso sealed transfers
- High-throughput operations per production efficiency
Vantaggi i-Motion Technology
Particle Generation Minimized
I benefici includono:
- Zero friction contact durante gate movement
- Reduced wear su sealing surfaces
- Extended seal life attraverso uniform pressure distribution
- Clean substrate transfer con particle control superiore
Operational Excellence
Science Probe garantisce:
- 3 million cycles maintenance-free operation
- Fast cycle times per high-throughput applications
- Reliable sealing anche in corrosive environments
- Pneumatic fail-safe positioning per power loss protection
Di conseguenza, ottimizzano yield e reduce operational costs.
Configurazioni Design
Valve Types Available
Science Probe offre:
- Bonnet flange designs con different rear openings
- Insert types con inside/outside chamber seats
- Rectangular cross-sections per large substrate transfer
- Custom dimensions per specific application requirements
Material Options
Per diverse applications:
- Aluminum construction per lightweight operations
- Hard anodized finishes per wear resistance
- Stainless steel options per corrosive environments
- Nickel-plated surfaces per special chemical compatibility
Inoltre, all materials selected per UHV compatibility e low outgassing.
Settori di Eccellenza
Semiconductor Industry
Per produzione avanzata:
- Wafer fabrication con multi-chamber systems
- Flat panel display manufacturing per large substrates
- Solar cell production con high-volume processing
- LED manufacturing per precision substrate handling
Research e Development
Per applications scientifiche:
- Surface science experiments con clean environments
- Material deposition studies per thin-film research
- Analytical instrumentation con sample transfer requirements
- National laboratories per advanced research projects
Integration e Control
System Compatibility
Le valvole supportano:
- Standard CF flanges per easy integration
- Pneumatic actuation con position indicators
- Automated sequences per production lines
- Emergency positioning per safety operations
Maintenance Features
Per operational efficiency:
- Easy disassembly per seal replacement
- Self-locking mechanisms per secure positioning
- Diagnostic capabilities per predictive maintenance
- Spare parts availability per long-term support
Pertanto, si integrano seamlessly in production environments esistenti.
Performance Specifications
Operating Parameters
Le specifiche includono:
- High vacuum operation fino a UHV levels
- Temperature compatibility per bake-out procedures
- Cycle life rating oltre 3 milioni operations
- Leak rates suitable per critical applications
Environmental Resistance
Science Probe garantisce:
- Corrosion resistance per aggressive chemicals
- Thermal stability durante temperature cycling
- Mechanical durability sotto repeated operations
- Chemical compatibility con process gases
Conclusioni
Le transfer valve i-Motion di Science Probe rappresentano la soluzione technology-leading per substrate transfer applications dove particle control e reliability sono critici. Grazie alla tecnologia i-Motion con contactless movement e vulcanized seals, queste valvole garantiscono performance eccellenti per semiconductor manufacturing e advanced research applications.
L’investimento in Science Probe assicura innovation cutting-edge per substrate handling excellence e production yield optimization.
Valvole gate di controllo